Product Code: ICAL08_M802

Surface Plasmonic Nano-processing with Template of Dielectric Particle Array by Femtosecond Laser Pulse
Authors:
Tetsuo Sakai, Keio University; Yokohamashi Japan
Henry Nugroho, Keio University; Hiyoshi Japan
Minoru Obara, Keio University; Yokohama-Shi Japan
Presented at ICALEO 2008

Nano-processing fabricated by near-field is becoming an emerging nanofabrication technology, because it can fabricate nano-scale structures even with near-infrared femtosecond laser. The near-field is generated by using dielectric nano-spherical particles with femtosecond laser. The dielectric particle acts as micro-lens and Mie scatterers, and then incident light is focused onto the nano-scale localized area. Consequently, the nano-hole is obtainable on the material surface. Here, we will report a new nano-processing technique via nano-plasmonics, even by the use of dielectric particles.Mono-dispersed small polystyrene (PS) particles (n=1.578) were deposited and arrayed hexagonally on glass and silicon substrate. Ti:sapphire laser (800 nm) was incident on it. On the Si substrate, nano-holes were fabricated under the PS particles. If the substrate is changed, nano-holes disappeared at the previous position and appeared newly at the gap areas between PS particles with high incident laser fluence. The physics of nano-hole fabrication process is changed by the laser fluence. The laser produced plasma in the PS particles by high fluence can play a plasmonic processing role.