Product Code: ICA11_M1307

The Research of the Connection of Excimer Laser Zoom-Processing Condition to the PMMA Micro-Channel's Edge-Smoothness and Roughness
Authors:
Xie Zhengyang, Beijing University of Technology; Beijing Peoples Republic of China
Chen Tao, Beijing University of Technology; Beijing Peoples Republic of China
Liu Ning, Beijing University of Technology; Beijing Peoples Republic of China
Shen Xuefei, Beijing University of Technology; Beijing Peoples Republic of China
Presented at ICALEO 2011

Excimer lasers can be applied to the micro-channel processing Polymethyl Methacrylate (PMMA) material. PMMA is known as a main material for the high polymer biochips and shows a property of the good absorption rate on the excimer laser. In this paper, Self-developed excimer laser zoom-lens-processing-system is applied to process the continuous width-transformations mirco-channel on PMMA. Firstly, the roughness of PMMA samples are studied by processed under different levels of the processing velocities and different levels of the excimer laser energy respectively. And the relationship amongst the velocities, energy and roughness is studied. Secondly, the relationship between the lens group and the transformation of the micro-channel is discussed. And possible improvements for the qualities of processing smoothness are further discussed based on the analysis of the relationship between the smoothness of mirco-channels edge and the processing velocities.