Product Code: ICA12_902

Fiber-Coupled High Power Stabilized Green Laser for Material Processing Applications
Authors:
Berthold Burghardt, INNOVAVENT GmbH; Goettingen Germany
Johannes Richter, INNOVAVENT GmbH; Goettingen Germany
Nick Hay, Powerlase Photonics Ltd.; Crawley Great Britain
Yili Guo, Powerlase Photonics Ltd.; Crawley Great Britain
Ian Baker, Powerlase Photonics Ltd.; Crawley Great Britain
Stuart Bashford, Powerlase Photonics Ltd.; Crawley Great Britain
Young Kwon, Powerlase Photonics Ltd.; Crawley
Jong Kab Park, EO Technics Co. Ltd.; Anyang South Korea
Hans-Juergen Kahlert, INNOVAVENT GmbH; Goettingen Germany
Presented at ICALEO 2012

A new high power (600 W and beyond) laser optical system has been developed which is operated by pulsed, green, diode-pumped solid state lasers. The design is based on multiplexing of lasers by fiber coupling and is scalable to power levels above 1.6 kW. The combined high pulse energy reaches up to 160 mJ and is arranged in a line beam by homogenizer based laser optics. Energy density up to 500 - 1,000 mJ/cm2 is obtained in a 100 - 750 mm long line. This line beam configuration can, for example, be optimised for both a-Si thin film annealing/crystallization and laser lift off (LLO) applications. Recent results will be reported.