Product Code: ICA12_M1104

Designer Pulses for Precise Machining of Silicon - A Step Towards Photonic Compositions
Authors:
Krste Pangovski, Centre for Industrial Photonics, Univ. of Cambridge; Cambrdge Great Britain
William O'Neill, Centre for Industrial Photonics, Univ. of Cambridge; Cambridge Great Britain
Peh Siong Teh, Optoelectronics Research Centre, Univ. Southampton; -
Shaif'ul Alam, Optoelectronics Research Centre, Univ. Southampton; -
David Richardson, Optoelectronics Research Centre, Univ. Southampton; -
Ali Gökhan Demir, Dipartimento di Meccanica, Politecnico di Milano; -
Presented at ICALEO 2012

Today there are many commercial nanosecond laser systems used in micromachining, with single pulse nanosecond laser ablation mechanisms becoming well documented and understood. The introduction of high performance short -pulse systems such as fiber and DPSS lasers with repetition rates in the several hundred-kHz range, have provided the user with a wide range of interaction parameters to chose from. The availability of high speed optical imaging techniques has also provided the opportunity to explore high-speed laser matter interactions in greater detail. In this paper we demonstrate a Pulsed digital holography (PDH) system for imaging the laser matter interaction using shaped nanosecond pulses. PDH is used to study the shock wave dynamics, laser induced and energy deposition efficiencies of single 10 ns - 200 ns shaped laser pulses with a temporal resolution of < 10 ns. Finally the effect of the laser-induced plume on subsequent laser pulses is determined using the PDH approach.