Authors:
V. Ferreras Paz
Institut fu¨r Technische Optik, Universita¨t Stuttgart, 70569 Stuttgart, Germany

M. Emons
Institut fu¨r Quantenoptik, Leibniz Universita¨t Hannover, 30167 Hannover, Germany

K. Obata
A. Ovsianikov
S. Peterha¨nsel
K. Frenner
C. Reinhardt
B. Chichkov
U. Morgner
W. Osten
Array

Investigations of two-photon polymerization (TPP) with sub-100 nm in the structuring resolution are presented by using photosensitive sol-gel material. The high photosensitivity of this material allows for TPP using a large variety in laser pulse durations covering a range between sub-10 fs and ≅140 fs. In this study, the authors demonstrate TPP structuring to obtain sub-100 nm in resolution by different approaches, namely, by adding a cross-linker to the material and polymerization with sub-10 fs short pulses. Additionally, a simulation and model based characterization method for periodic sub-100 nm structures was implemented and applied in an experimental white light interference Fourier-Scatterometry setup.