ICALEO 2007 Paper #M1201 (EUV and Debris Characteristics of a Laser-Produced Tin Plasma using a Colloidal Tin Dioxide Jet Target)
EUV and Debris Characteristics of a Laser-Produced Tin Plasma using a Colloidal Tin Dioxide Jet Target
Authors:
Masahito Katto, University of Miyazaki; Miyazaki Japan
Masanori Kaku, University of Miyazaki; Miyazaki Japan
Shoichi Kubodera, University of Miyazaki; Miyazaki Japan
Presented at ICALEO 2007
Characteristics of emitted particles as well as EUV emissions from a laser-produced tin plasma using a colloidal tin dioxide nano-particle jet target were investigated as a possible EUV lithography light source. By using double nano-second YAG laser pulses with an optimum delay of 100 ns, the EUV conversion efficiency of 1.2% at 13.5 nm was observed. The energy and streng...$28.00
ICALEO 2007 Paper #M1107 (A Novel Laser Technique for Patterning Black Matrix in LCD Manufacture)
A Novel Laser Technique for Patterning Black Matrix in LCD Manufacture
Authors:
Jozef Wendland, Powerlase Limited; Crawley Great Britain
Paul Harrison, Powerlase Limited; Crawley Great Britain
Matt Henry, Powerlase Limited; West Sussex Great Britain
Presented at ICALEO 2007
Liquid Crystal Displays (LCDs) represent the most widely manufactured form of Flat Panel Display (FPD) in the world today. This market is extremely price sensitive and so competition is fierce. In an attempt to reduce costs, manufacturers are always interested in new technology to gain a lead on their competition. In recent years laser use has been increasing in the manufacture of FPDs most nota...$28.00
ICALEO 2007 Paper #M1106 (Optical Trapping for Engineering Manufacture)
Optical Trapping for Engineering Manufacture
Authors:
Stuart Edwardson, The University of Liverpool; Liverpool Great Britain
Martin Sharp, The University of Liverpool; Liverpool Great Britain
Walter Perrie, The University of Liverpool; Liverpool Great Britain
Geoff Dearden, The University of Liverpool; Liverpool Great Britain
David Whitehead, The University of Manchester; Manchester Great Britain
Z B Wang, The University of Manchester; Manchester Great Britain
Philip Crouse, The University of Manchester; Manchester Great Britain
Z Lui, The University of Manchester; Manchetser Great Britain
Ken G. Watkins, The...$28.00
ICALEO 2007 Paper #M1104 (Dimensional Accuracy Optimization of the Laser Milling Process)
Dimensional Accuracy Optimization of the Laser Milling Process
Authors:
Antonio Domenico Ludovico, Politecnico di Bari; Bari Italy
Carmela Deramo, Politecnico Di Bari; Bari Italy
Sabina Luisa Campanelli, Politecnico Di Bari; Bari Italy
Presented at ICALEO 2007
Laser micromachining provides a new method of producing parts in a wide range of materials directly from CAD data. Particularly, in laser milling technology the material is removed by a laser beam through the layer by layer ablation mechanism.
The aim of this paper was to determine the process capability of the laser micro-milling process, optimising the surface finish and at the same time keeping an high mater...$28.00
ICALEO 2007 Paper #M1103 (Demonstrated Fossil-Fuel-Free Energy Cycle using Magnesium and Laser (Invited Paper - 40 Minute Presentation))
Demonstrated Fossil-Fuel-Free Energy Cycle using Magnesium and Laser (Invited Paper - 40 Minute Presentation)
Authors:
Kunio Yoshida, Tokyo Institute of Technology; Tokyo Japan
Takashi Yabe, Tokyo Institute of Technology ; Tokyo Japan
Shigeaki Uchida, Tokyo Institute of Technology; Tokyo Japan
Presented at ICALEO 2007
There is no doubt that we need an energy cycle free of fossil fuels that otherwise emit greenhouse gases causing global warming. Although solar energy is the ultimate renewable energy source, sunlight is available only in the clear daytime and hence it cannot be an alternative to thermal power stations unless effective and large power storage systems a...$28.00
ICALEO 2007 Paper #M1101 (High Quality Laser Micromachining of Silicon: A Crystallographic Comparison of Process Results Achieved with State-of-the-Art Tripled Nd:YAG and IR Lasers)
High Quality Laser Micromachining of Silicon: A Crystallographic Comparison of Process Results Achieved with State-of-the-Art Tripled Nd:YAG and IR Lasers
Authors:
Claudio Ferrari, Instituto IMEM CNR; Parma Italy
Lucia Nasi, Instituto IMEM CNR; Parma Italy
Werner Wiechmann, JDSU Corporation; San Jose CA USA
Pellegrino Sergio, LaserPoint sri; Vimodrone Italy
Presented at ICALEO 2007
The ability to cut, scribe, and drill holes and slots in Silicon material is of great interest for many applications in the microelectronics and semiconductor industry. We investigated the use of a Q-switched frequency-tripled Nd:YAG laser for rapid micromachining of Silicon an...$28.00
ICALEO 2007 Paper #M105 (Selective Femtosecond Laser Micro-structuring of Photoresists and TCO)
Selective Femtosecond Laser Micro-structuring of Photoresists and TCO
Authors:
Sandra Zoppel, Vorarlberg University of Applied Sciences; Dornbirn Austria
Stefan Partel, Vorarlberg Univ. of Applied Sciences; Dornbirn Austria
Georg A. Reider, Vienna Univ. of Technology; Vienn Austria
Max Lederer, HighQ Laser; Hohenems Austria
Pavlina Choleva, Vorarlberg Univ. of Applied Sciences; Dornbirn Austria
Presented at ICALEO 2007
We present recent results on selective laser ablation of thick photoresists (AZ-types) and TCO (transparent conductive oxide) layers from dielectric substrates. The well defined threshold for the ablation with ultrashort laser p...$28.00
ICALEO 2007 Paper #M104 (Precise Patterning of Thin Films with Picosecond Fiber Laser)
Precise Patterning of Thin Films with Picosecond Fiber Laser
Authors:
Jari Sillanpää, Corelase; Tampere Finland
Kalle Klä-Jarkko, Corelase; Tampere Finland
Harry Asonen, Corelase; Tampere Finland
Presented at ICALEO 2007
During the last few years fiber lasers have become the hottest topic in material processing applications. In macromachining applications they have been able to take market share from conventional lamp pumped YAG-lasers while also enabling totally new applications that so far have not been in the reach of conventional laser tools. Micro manufacturing processes are the fastest growing applications for lasers due to the dynamic consumer electronics mar...$28.00
ICALEO 2007 Paper #M103 (Femtosecond Laser Micro-Structuring of Materials in the NIR and UV Regime)
Femtosecond Laser Micro-Structuring of Materials in the NIR and UV Regime
Authors:
D. Liu, The University of Liverpool; Liverpool Great Britain
J. Cheng, The University of Liverpool; Liverpool Great Britain
Walter Perrie, The University of Liverpool; Liverpool Great Britain
A. Baum, The University of Manchester; Manchester Great Britain
Martin Sharp, The University of Liverpool; Liverpool Great Britain
P. Scully, The University of Manchester; Manchester Great Britain
Stuart Edwardson, The University of Liverpool; Liverpool Great Britain
N. Semaltianos, The University of Liverpool; Liverpool Great Britain
Z. Ku...$28.00
ICALEO 2007 Paper #M102 (Via Hole Machining in Sapphire using an Ultrafast Laser)
Via Hole Machining in Sapphire using an Ultrafast Laser
Authors:
Nagaraj Batta, Panasonic Boston Lab; Cambridge MA USA
Shuichi Nagai, Panasonic Boston Lab; Cambridge MA USA
Ming Li, Panasonic Boston Lab; Cambridge MA USA
Presented at ICALEO 2007
GaN is expected to replace GaAs and Si materials in the next generation high power density Microwave Monolithic Integrated Circuits (MMIC), thanks to its excellent material characteristics. Sapphire is one of the most promising substrate materials for GaN-based MMIC for its excellent physical characteristics and cost effectiveness. Interconnects across MMIC devices are made possible by via holes through sapphire layer, which i...$28.00
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