PICALO 2008 Paper #M302 (Innovative Laser Technology for Semiconductor Manufacturing -Stealth Dicing (Invited Paper))

Innovative Laser Technology for Semiconductor Manufacturing -Stealth Dicing (Invited Paper)
Authors:
Etsuji Ohmura, Osaka University; Suita, Osaka Japan
Hideki Morita, Hamamatsu Photonics K.K.; Iwata Japan
Masayoshi Kumagai, Hamamatsu Photonics K.K.; Iwata Japan
Presented at PICALO 2008

When a permeable nanosecond pulse laser which is focused into the inside of a silicon wafer is scanned in the horizontal direction, a belt-shaped high dislocation density layer including partially polycrystalline region is formed at an arbitrary depth in the wafer. Applying tensile stress perpendicularly to this belt-shaped modified-layer, silicon wafer can be separated easily into ind...

PICALO 2008 Paper #M301 (Progress in R&D on Ultrafast Laser Processing and Prospect of Industrial Applications (Invited Paper))

Progress in R&D on Ultrafast Laser Processing and Prospect of Industrial Applications (Invited Paper)
Authors:
Xinbing Liu, Panasonic Boston Laboratory; Cambridge MA USA
Presented at PICALO 2008

tba

PICALO 2008 Paper #M205 (Large Area Nanopatterning of Silicon Surface by Chemical Assisted Laser Processing using Near-Field Enhancement by Particle-Lens Arrays)

Large Area Nanopatterning of Silicon Surface by Chemical Assisted Laser Processing using Near-Field Enhancement by Particle-Lens Arrays
Authors:
Wei Guo, 1Laser Processing Research Centre, School of Mechanical, Aerospace and Civil Engineering; Manchester Great Britain
ZENGBO WANG, Laser Processing Research Centre; Manchester Great Britain
Lukyanchuk Boris, Data Storage Institute, Dsi Building, 5 Engineering Drive 1, Singapore; Singapore Singapore
David Whitehead, 1Laser Processing Research Centre, School of Mechanical, Aerospace and Civil Engineering; Manchester Great Britain
Lin Li, 1Laser Processing Research Centre, School of Mechanical, Aerospace and Civil E...

PICALO 2008 Paper #M1205 (Fabrication of Micro-Machine Elements by Five-Axis Laser Processing System)

Fabrication of Micro-Machine Elements by Five-Axis Laser Processing System
Authors:
Souta Matsusaka, Chiba University; Chiba Japan
Kensuke Iijima, Chiba University; Chiba Japan
Takehiro Watanabe, Chiba University; Chiba USA
Youhei Mizoguchi, Chiba University ; Chiba Japan
Presented at PICALO 2008

Laser micro-processing system, which consisted of five-axis automatic stage controlled with PC and UV nanosecond laser oscillator was developed. This system enabled both of milling and lathe processing by arrangement of the stages. Micro-windmills with multiple blades, micro-cylindrical cantilevers, micro-screw and micro-bevel gear were fabricated on polyimide fi...

PICALO 2008 Paper #M1204 (Improving Optical Transmittance of Double Walled Carbon Nanotube Film by Laser Processing)

Improving Optical Transmittance of Double Walled Carbon Nanotube Film by Laser Processing
Authors:
Tao Gong, Tsinghua University, Dept of Mechanical Engineering; Beijing Peoples Republic of China
Yong Zhang, Tsinghua University, Dept of Mechanical Engineering; Beijing Peoples Republic of China
Minlin Zhong, Tsinghua University; Beijing Peoples Republic of China
Wenjin Liu, Tsinghua University, Dept of Mechanical Engineering; Beijing Peoples Republic of China
Yi Jia, Tsinghua University; Beijing Peoples Republic of China
Chaofeng Wu, Tsinghua University; Beijing Peoples Republic of China
Kunlin Wang, Tsinghua University; Beijing Peoples...

PICALO 2008 Paper #M1203 (Fabrication of Carbon Nanotube Interconnections by Current-assisted Laser Irradiation)

Fabrication of Carbon Nanotube Interconnections by Current-assisted Laser Irradiation
Authors:
Tao Gong, Tsinghua University, Dept of Mechanical Engineering; Beijing Peoples Republic of China
Yong Zhang, Tsinghua University, Dept of Mechanical Engineering; Beijing Peoples Republic of China
Chaofeng Wu, Tsinghua University; Beijing Peoples Republic of China
Minlin Zhong, Tsinghua University; Beijing Peoples Republic of China
Wenjin Liu, Tsinghua University, Dept of Mechanical Engineering; Beijing Peoples Republic of China
Jinquan Wei, Tsinghua University; Beijing Peoples Republic of China
Yi Jia, Tsinghua University; Beijing Peoples Re...

PICALO 2008 Paper #M1202 (Laser Micro Adjustment Technology - Possibilities and Challenges for Novel Applications (Invited Paper))

Laser Micro Adjustment Technology – Possibilities and Challenges for Novel Applications (Invited Paper)
Authors:
Michael Schmidt, Bayerisches Laserzentrum GmbH; Erlangen Germany
P. Bechtold, Bayerisches; Erlangen Germany
Presented at PICALO 2008

In the field of micro technology highest accuracies in terms of position, angles and distances are of particular importance. It is becoming increasingly expensive and difficult to directly position and fix critical components to each other for two reasons: on the one hand, the dimensions and thus the tolerances get smaller due to ongoing miniaturisation and on the other hand, the number of integrated functional components is rising consta...

PICALO 2008 Paper #M1201 (Aligned Growth of Zno Nanowires by Laser Ablation and Their Applications (Invited Paper))

Aligned Growth of Zno Nanowires by Laser Ablation and Their Applications (Invited Paper)
Authors:
Tatsuo Okada, Kyushu University; Fukuoka Japan
Jun Nishimura, Kyushu University; Kukuoka Japan
Ruiqian Guo, Fudan University ; Shanghai Peoples Republic of China
Masato Matsumoto, Kyushu University; Fukuoka Japan
D. Nakamura, Kyushu University; Fukuoka Japan
M. Higashihata, Kyushu University; Fukuoka Japan
Presented at PICALO 2008

I am going to present our recent progress in the syntesis of ZnO nanowires by nanoparticle assisted pulsed laser deposition, and their possible applications to optelectronic devices.

PICALO 2008 Paper #M1103 (Flash Lamp Curing of Nano-Particulates for Passive Device Fabrication (Invited Paper))

Flash Lamp Curing of Nano-Particulates for Passive Device Fabrication (Invited Paper)
Authors:
James Sears, South Dakota School of Mines & Technology; Rapid City SD USA
Jeffery West, South Dakota School of Mines & Technology; Rapid City SD USA
Michael Carter, South Dakota School of Mines & Technology; Rapid City SD USA
Presented at PICALO 2008

Photonic Curing is being developed to cure or sinter metal nano-particle based films by exposing them to a brief, intense pulse of light from a xenon flash lamp. This photonic curing technology allows for rapid and selective heating that fuses nano-scale metallic ink particles into functional components. This technology allows th...

PICALO 2008 Paper #M1102 (Fabrication of Nanomaterials by Laser Irradiation in Liquid Phase (Invited Paper))

Fabrication of Nanomaterials by Laser Irradiation in Liquid Phase (Invited Paper)
Authors:
Naoto Koshizaki, National Institute of Advanced Industrial Science and Technology (AIST); Tsukuba Japan
Takeshi Sasaki, National Institute of Advanced Industrial Science and Technology (Aist); Tsukuba Japan
Presented at PICALO 2008

We have been working on a nanoparticle fabrication technique by irradiating laser light onto a plate placed or powder dispersed in liquid media. This technique has several advantages over conventional nanoparticle preparation in liquid phase; highly pure nanoparticles with less use of surfactant molecules mostly toxic in biological systems, and crystallized nanopar...