Product Code: ICAL05_M401

Realization of Precision Shaped-Hole Drilling Using Ultra-Fast Lasers (Invited Paper)
Authors:
Chen-Hsiung Cheng, Panasonic Boston Laboratory; Cambridge MA USA
Xinbing Liu, Panasonic Boston Laboratory; Cambridge MA USA
Presented at ICALEO 2005

Recently we developed the technique of using ultra-fast laser for shaped-hole fabrication in industrial applications. In particular, inkjet nozzles of funnel shape can be fabricated reproducibly, precisely and in high speed using the ultra-fast laser fabrication technique. A PC-controlled scanning mirror is used to steer laser beam and form an overlapped two-dimensional tool path. Laser beam is repetitively scanned over the target area of the substrate, and the induced ablation removes material layer by layer on the fly. In order to achieve the required precision in geometry, specific tool path algorithm is formulated and applied to the fabrication process. Adverse factors such as hysteresis and differential scanning coefficients are dramatically reduced. The tool path and result will be illustrated and demonstrated in this presentation.