Product Code: ICAL05_M402

Direct Writing of Buried Waveguides in Hybrid Organic-Inorganic Sol-Gel by Femto-Second Laser Pulses
Authors:
David K.Y. Low, Singapore Institute of Manufacturing Technology; Singapore
Xiao Zhang, Singapore Institute of Manufacturing Technology; Singapore
Hong Xie, Singapore Institute of Manufacturing Technology; Singapore
Z.L. Li, Singapore Institute of Manufacturing Technology; Singapore Singapore
GC Lim, Singapore Institute of Manufacturing Technology; Singapore
S.K. Pani, Nanyang Technological University; Singapore
C.C Wong, Nanyang Technological University ; Singapore
Presented at ICALEO 2005

Using 775 nm femtosecond laser pulses, buried waveguides were directly fabricated inside hybrid organic-inorganic sol-gel film (70 micron thick), comprising methacryloxypropyltrimethoxysilane and zirconia. Waveguides with typical cross-sectional dimensions of ~7x10 um2 were produced. A refractive index increment of ~2 x 10-3 was measured. Using Fourier Transform InfraRed spectroscopy and scanning electron microscopy, the increase in refractive index was attributed to localized densification of the hybrid sol-gel initiated by the femtosecond laser pulses. The fabrication of a multi-layer 3x3 stacked waveguides was also demonstrated.