Product Code: ICAL05_M410

Microprocessing of Various Materials Using Femtosecond Laser Pulses
Authors:
Udo Loeschner, University of Applied Sciences; Mittweida Germany
Andy Engel, University of Applied Sciences; Mittweida Germany
Steffen Weissmantel, University of Applied Sciences; Mittweida Germany
Guenter Reisse, University of Applied Sciences; Mittweida Germany
Presented at ICALEO 2005

Comprehensive results on femtosecond-laser microstructuring obtained at the laser institute of the University of Applied Sciences Mittweida will be presented. In our In-vestigations we used a femtosecond-laser micromachining station FS150-10 from the 3D Micromac AG Chemnitz equipped with a Ti: Sapphire-Laser CPA 2010 from Clark-MXR Inc. Michigan. All experiments were performed so far with the laser beam focussed on the sample surface using different transmitting objectives and a reflec-tive objective.
The ablation behaviour of various materials e.g. semiconductor material, glasses and metals as well as that of superhard carbon coatings was investigated in dependence of the process parameters. Based on the investigations, various microstructures showing smooth walls and steep wall angles were produced in those materials. The parameters which were found to be optimum for micromachining of each material will be presented. The microstructures consist of holes, channels and cavities. Remarka-bly, in glass drilling the formation of cracks in the vicinity of holes or on walls due to the laser machining was not observed.
Finally, we are going to present several 3d demonstrator structures in various materi-als meant for a wide variety of applications especially in the production of microsystems, which are made by a combination of holes, channels and cavities.