Product Code: ICAL09_M701

Rapid Prototyping Process Based on the Use of an Intelligent Pinhole Mask and 193 nm Excimer Laser Used to Fabricate Polymer Microfluidic Devices
Authors:
Kevin Conlisk, National Centre for Laser Applications, National Univ. of Ireland; Galway Ireland
Richard Sherlock, National Centre for Laser Applications, National Univ. of Ireland; Galway Ireland
Gerard M. O'Connor, National Centre for Laser Applications, National Univ. of Ireland; Galway Ireland
Thomas J. Glynn, National Centre for Laser Applications, National Univ. of Ireland; Galway Ireland
Presented at ICALEO 2009

Laser use for rapid prototyping of microfluidic devices has proven useful but can have certain drawbacks including variations in channel width, depth and shape when producing complex geometries. We describe our work on an advanced rapid laser prototyping technique, based on the use of an intelligent pinhole and 193 nm excimer laser. The pinhole, a dynamic mask, consists of four individually programmable blades controlled through a LabVIEW user interface. Each blade has the capability to be positioned with sub-micron repeatability with a response time on the order of 5 ms. Synchronization with the excimer laser ProcessPower software allows the fabrication of more complex microchannel layouts that wouldnt be possible with fixed mask techniques. It also offers more flexibility over Opposed Coordinate Motion (OCM) fabrication methods as you can quickly and easily change the microchannel layout by reprogramming the pinhole. We can, thereby, eliminate some of the undesirable effects associated with scanning laser ablation, such as ramps leading into and out of microchannels and banking or undercutting effects at microchannel junctions and corners. We will demonstrate developed beam re-configuration techniques and show the system's potential to rapidly generate varying design iterations by fabricating a working microfluidic device and testing its application.