Product Code: ICAL09_M702
Fabrication of High-resolution Conducting Pattern on Polyvinylidene Fluoride Substrates by KrF Excimer Laser
Authors:
Ying Liu, Beijng University of Technology; Beijing China Peoples Republic of China
Yijian Jiang, Beijing University of Technology; Beijing China Peoples Republic of China
Presented at ICALEO 2009
This paper describes using KrF excimer laser for fabricating conducting graph on Polyvinylidene fluoride (PVDF) substrates. Any graph is machined by direct laser writing technique. Furthermore, the defect structure is prepared on this patterned surface where laser etching is carried out. Mask patterning is used to select the conducting area when the patterned sample is irradiated by KrF excimer laser. As a result, the conducting layer is controlled automatically and generated rapidly on the surface. Conductivity on the order of 10-1 Ω-1cm-1, increasing up to 12 orders of magnitude, is obtained under the laser energy density form 44mJ /cm2 to 112mJ /cm2.
The surface morphology and chemical constitution of modified surfaces investigated by scanning electron microscope (SEM), X-Ray Photoelectron Spectroscopy (XPS) and Fourier-Transform-Raman spectroscopy (FT-Raman).Based on the results, the possible mechanisms of conducting layer formation are discussed.
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