Product Code: ICA10_M1302

Femtosecond Laser Ablation of Indium Tin Oxide (ITO) Glass for Fabrication of Thin Film Solar Cells
Authors:
Q. Bian, Kansas State University; Manhattan KS USA
X. Shen, Kansas State University; Manhattan KS USA
S. Chen, Kansas State University; Manhattan KS USA
Z. Chang, Kansas State University; Manhattan KS USA
S. Lei, Kansas State University; Manhattan KS USA
Presented at ICALEO 2010

Transparent conductive oxide (TCO) film on glass substrate has been widely used for making thin film solar cells and organic solar cells. Its important to scribe transparent oxide (TCO) film in order to fabricate different types of thin film solar cells. Here we report ablation of transparent conductive oxide (TCO) film using a Ti:sapphire laser with 800 nm wavelength in ambient air and a pulse duration of ~40 fs. We investigate the laser fluence to breakdown transparent conductive oxide (TCO) film and the ablation rate at different energy levels. The factors influencing the ablation quality are studied. The groove details from laser scribing are characterized using a number of techniques such as optical microscopy and scanning electron microscopy. This work provides insights for micromachining transparent conductive film on glass substrate using femtosecond laser.