Product Code: ICA10_P153

Surface Analysis System by VUV Photons-Stimulated Desorption.
Authors:
Masahito Katto, Cooperative Research Center, University of Miyazaki; Miyazaki Japan
Atushi Yokotani, Dept. of Electrical and Electronic Eng., University of Miyazaki; Miyazaki Japan
Masanori Kaku, Dept. of Electrical and Electronic Eng., University of Miyazaki; Miyazaki
Shoichi Kubodera, Dept. of Electrical and Electronic Eng., University of Miyazaki; Miyazaki Japan
Nobuyoshi Miyabayashi, Esco, Ltd.; Musashino Japan
Wataru Sasaki, NTP, Inc., CRC, University of Miyazaki; Miyazaki Japan
Presented at ICALEO 2010

We developed a novel surface analysis tecnique using a VUV photons from a laser induced plasma. VUV photons stimulated the surface desorption and the atoms were analyzed by the quadro-pole mass analyzer. We scanned the VUV wavelength and obtained the mass data. This method eneble us to analyze without a damage on the sample.