Product Code: ICA11_P142

Laser Annealing of ITO Nanoparticles for TCO Films Using 1.5 μm Laser Radiation
Authors:
Heng Pan, Applied Materials Inc.; - USA
C.P. Grigoropoulos, University of California; Berkeley CA
Daeho Lee, University of California; Berkeley CA
Tony Hoult, IPG Phototonics; Santa Clara
Hee Park, AppliFlex LLC; Moutain View CA
Presented at ICALEO 2011

Low average power fiber lasers are being used for an ever expanding range of applications, most of these employ near infrared wavelengths in the 1070 nm range. Substituting erbium or thulium doped active media for ytterbium dopants enables the manufacture of fiber lasers emitting in the mid infra-red 1.5 and 2 um regime. Some details on these lasers that are now available at average powers relevant for industrial applications are presented. Furthermore, a novel application for a 1.5 um fiber laser is explored; localized thermal treatment of solution deposited ITO nanoparticle film for large area and low cost manufacturing of Transparent Conducting Oxide. These doped metal oxide films are widely used in a range of optoelectronic devices such as flat panels and PV cells as they allow light transmission whilst providing high electrical conductivity. Substantial technical benefits are presented and the consequent commercial benefits for this process are also explored.