Product Code: ICA12_M508

Influence of Surrounding Gas Type and Pressure Condition on Micro-Drilling of Silicon Carbide by Harmonics of Nd:YAG Laser
Authors:
Yasuhiro Okamoto, Okayama Univ.; Okayama Japan
Shin Urushibata, Okayama Univ.; Okayama Japan
Akira Okada, Okayama Univ.; Okayama Japan
Tomokazu Sakagawa, Kataoka Corporation; Yokohama Japan
Shin-ichi Nakashiba, Kataoka Corporation; Yokohama Japan
Presented at ICALEO 2012

In this study, micro-machining characteristics of silicon carbide by the fundamental and the three kinds of harmonic of Nd:YAG laser were experimentally investigated in the viewpoints of wavelength and the surrounding condition. Moreover, micro-machining characteristics of silicon carbide by the harmonics of Nd:YAG laser were discussed by the observation of the flow filed and the debris behavior on the specimen surface with a high speed camera. The cracks were observed around drilled hole under the argon surrounding gas condition due to the high intensity plasma existing. On the other hand, helium surrounding gas kept the plasma in the vicinity region on the top surface of specimen, and the surrounding area of drilled hole was remarkably roughened. The better surface integrity could be obtained under the appropriate combination of surrounding gas and pressure conditions.