Product Code: ICA12_N404

Three-Dimensional Micro/Nano-Fabrication by Integration of Additive and Subtractive Femtosecond-Laser Direct Writing Processes
Authors:
Wei Xiong, Department of Electrical Engineering, Univ. of Nebraska-Lincoln; Lincoln NE USA
Yunshen Zhou, Department of Electrical Engineering, Univ. of Nebraska-Lincoln; Lincoln NE USA
Xiangnan He, Department of Electrical Engineering, Univ. of Nebraska-Lincoln; Lincoln NE USA
Yang Gao, Department of Electrical Engineering, Univ. of Nebraska-Lincoln; Lincoln NE USA
Masoud Mahjouri-Samani, Department of Electrical Engineering, Univ. of Nebraska-Lincoln; Lincoln NE USA
Tommaso Baldacchini, Department of Electrical Engineering, Univ. of Nebraska-Lincoln, Technology and Applications Center, Newport Corporation; Irvine CA USA
Yongfeng Lu, Department of Electrical Engineering, Univ. of Nebraska-Lincoln; Lincoln NE USA
Presented at ICALEO 2012

Advanced three-dimensional (3D) micro/nano-fabrication requires both additive and subtractive fabrication processes. However, method possessing both additive and subtractive fabrication capabilities was rarely reported. In this study, we developed a complementary 3D micro/nano-fabrication process by integrating the additive two-photon polymerization (TPP) and the subtractive multi-photon ablation (MPA) into a single platform of femtosecond-laser direct writing process. Functional device structures including polymer fiber Bragg grating containing periodic holes of 500-nm diameter and 3D micro-fluidic systems containing arrays of channels of 1-µm diameter were successfully fabricated and characterized. The combination of TPP and MPA processes enhances the nanofabrication efficiency and enables the fabrication of complex 3D micro/nano-structures that are impractical to produce by either TPP or MPA alone. The new fabrication method is promising for a wide range of applications including integrated optics, micro-fluidics, and microelectromechanical systems.