Product Code: ICA12_P151

Laser Precision Micromachining and Quality Evaluation of Tempered Oxide Glasses
Authors:
Hyonkee Sohn, Korea Institute of Machinery and Materials; Daejeon South Korea
Jeong Suh, Korea Institute of Machinery and Materials; Daejeon South Korea
Jiyeon Choi, Korea Institute of Machinery and Materials; Daejeon South Korea
Presented at ICALEO 2012

Tempered oxide glasses are of great importance in display manufacturing for their superior optical properties and chemical, mechanical robustness. However, micromachining of brittle materials is not an easy task through conventional mechanical approaches such as diamond sawing and water-jet. Recently increasing attention has been paid to laser micromachining using short and ultrashort pulsed lasers since this technique has shown remarkable success in high precision micromachining of glasses by taking advantages of non-contact and chemical-free clean process. In this paper, two strategies exploiting short pulsed lasers are considered to micromachine glasses. Direct ablation is advantageous in terms of flexibility as the scheme is a simple, intuitive method. Laser-induced structural modification of glass does not produce drastic material removal often causing collateral damage to the surroundings, thus it is preferable for damage-free microprocessing. This approach combining ablation and photo-induced structural modification of glasses will provide a novel protocol to all-optical fabrication.