Product Code: ICA13_M203

High Throughput Surface Structuring with Ultrashort Pulses in Synchronized Mode with Fast Polygon Line Scanner
Authors:
Beat Neuenschwander, Bern University of Applied Sciences; Burgdorf Switzerland
Beat Jaeggi, Bern University of Applied Sciences Engineering and Information Technology; Burgdorf Switzerland
Markus Zimmermann, Bern University of Applied Sciences Engineering and Information Technology; Burgdorf Switzerland
Lars Penning, Next Scan Technology Bv; Bd Silvolde Netherlands
Ronny De Loor, Next Scan Technology Bv; Bd Silvolde Netherlands
Kurt Weingareten, Time Bandwidth Products Ag; Zuerich Switzerland
Andreas Oehler, Time Bandwidth Products Ag; Zuerich Switzerland
Presented at ICALEO 2013

High precision laser micromachining requires an exact synchronization of the laser pulse train with the mechanical axes of the motion system to ensure for each single pulse a precise control of the position of the laser spot on the target. For ultra short pulsed laser systems this was already demonstrated with a conventional galvo scanner. But this solution is limited by the scanner architecture to a marking speed of about 10m/s with a maximum scan line length about 100mm. It is therefore not suited for average powers far beyond 10W when working at the optimum point with highest removal rate and machining quality is desired. A way out is offered by polygon line scanners which are able to realize much higher marking speeds at high scan line lengths. We will report on the results with a polygon line scanner having a maximum marking speed of 100m/s, a scan line length of 170mm, spot diameters of 50um (1064nm) and 25um (532nm) together with a 50W ps laser system. The precise control of the laser spot position i.e. the synchronization is realized via the new SuperSyncTM technology. Decoating, perforation and 3d patterning will act as benchmark processes to evaluate this scanning technology.