Product Code: PIC2008_M1205

Fabrication of Micro-Machine Elements by Five-Axis Laser Processing System
Authors:
Souta Matsusaka, Chiba University; Chiba Japan
Kensuke Iijima, Chiba University; Chiba Japan
Takehiro Watanabe, Chiba University; Chiba USA
Youhei Mizoguchi, Chiba University ; Chiba Japan
Presented at PICALO 2008

Laser micro-processing system, which consisted of five-axis automatic stage controlled with PC and UV nanosecond laser oscillator was developed. This system enabled both of milling and lathe processing by arrangement of the stages. Micro-windmills with multiple blades, micro-cylindrical cantilevers, micro-screw and micro-bevel gear were fabricated on polyimide films and silver-sodium ion-exchanged glasses by the milling and lathe methods. The dimension errors of these elements were within five percent of designed diameter. However, some defects such as large surface roughnesses and micro-chippings occurred at processed surfaces. These problems will be solved by higher pulse energy irradiations and improvement of cutting procedures.