PICALO 2008 Paper #M205 (Large Area Nanopatterning of Silicon Surface by Chemical Assisted Laser Processing using Near-Field Enhancement by Particle-Lens Arrays)

Large Area Nanopatterning of Silicon Surface by Chemical Assisted Laser Processing using Near-Field Enhancement by Particle-Lens Arrays
Authors:
Wei Guo, 1Laser Processing Research Centre, School of Mechanical, Aerospace and Civil Engineering; Manchester Great Britain
ZENGBO WANG, Laser Processing Research Centre; Manchester Great Britain
Lukyanchuk Boris, Data Storage Institute, Dsi Building, 5 Engineering Drive 1, Singapore; Singapore Singapore
David Whitehead, 1Laser Processing Research Centre, School of Mechanical, Aerospace and Civil Engineering; Manchester Great Britain
Lin Li, 1Laser Processing Research Centre, School of Mechanical, Aerospace and Civil E...

PICALO 2008 Paper #M301 (Progress in R&D on Ultrafast Laser Processing and Prospect of Industrial Applications (Invited Paper))

Progress in R&D on Ultrafast Laser Processing and Prospect of Industrial Applications (Invited Paper)
Authors:
Xinbing Liu, Panasonic Boston Laboratory; Cambridge MA USA
Presented at PICALO 2008

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PICALO 2008 Paper #M302 (Innovative Laser Technology for Semiconductor Manufacturing -Stealth Dicing (Invited Paper))

Innovative Laser Technology for Semiconductor Manufacturing -Stealth Dicing (Invited Paper)
Authors:
Etsuji Ohmura, Osaka University; Suita, Osaka Japan
Hideki Morita, Hamamatsu Photonics K.K.; Iwata Japan
Masayoshi Kumagai, Hamamatsu Photonics K.K.; Iwata Japan
Presented at PICALO 2008

When a permeable nanosecond pulse laser which is focused into the inside of a silicon wafer is scanned in the horizontal direction, a belt-shaped high dislocation density layer including partially polycrystalline region is formed at an arbitrary depth in the wafer. Applying tensile stress perpendicularly to this belt-shaped modified-layer, silicon wafer can be separated easily into ind...

PICALO 2008 Paper #M303 (High Quality Micro Machining with Tailored Short and Ultra Short Laser Pulses)

High Quality Micro Machining with Tailored Short and Ultra Short Laser Pulses
Authors:
Arnold Gillner, Fraunhofer-Institute for Laser Technology; Aachen Germany
Claudia Hartmann, Fraunhofer-Institute for Laser Technology; Aachen Germany
Andreas Dohrn, Fraunhofer-Institute for Laser Technology; Aachen Germany
Presented at PICALO 2008

In the production of micro-scaled products and products with micro and nano scaled surface functionalities, laser ablation becomes a more and more important tool which is able to generate structure sizes in the range of 10 100 µm and with new machining strategies even in range smaller than one micrometer. One crucial task for all laser...

PICALO 2008 Paper #M305 (Precise Photonic Engines for Uv Pulsed Laser Deposition)

Precise Photonic Engines for Uv Pulsed Laser Deposition
Authors:
Ralph Delmdahl, Coherent GmbH; Goettingen Germany
Presented at PICALO 2008

High pulse energy excimer lasers with pulse energies between 300mJ and 1200mJ/pulse and photon energies between 5eV and 7.9eV lend maximum flexibility to the technique of pulsed laser deposition. On account of the high energy densities accessible with the latest generation of excimer lasers, the entire material spectrum including high band-gap metal oxides such as ZnO is amenable to precise and controlled ablation with subsequent stoichiometric transfer to the substrat. Because the transferred material needs time to smoothly deposit and position itself opti...

PICALO 2008 Paper #M401 (3D Microstructuring of Glass by Femtosecond Laser for Lab-On-A-Chip Applications (Invited Paper))

3D Microstructuring of Glass by Femtosecond Laser for Lab-On-A-Chip Applications (Invited Paper)
Authors:
Koji Sugioka, RIKEN; Saitama Japan
Yasutaka Hanada, RIKEN; Wako, Saitama Japan
Katsumi Nidorikawa, Riken; Wako, Saitama Japan
Presented at PICALO 2008

Three-dimensional (3D) microfabrication of photostructurable glass by femtosecond (fs) laser direct writing is demonstrated for manufacture of Lab-on-a chip devices. The fs laser direct writing followed by annealing and successive wet etching can fabricate the hollow microstructures, achieving a vareiety of microfluidic components and microoptical components in a glass chip. One of the interesting and important appl...

PICALO 2008 Paper #M402 (Development of Electrodes for the Application of Microbatteries (Invited Paper))

Development of Electrodes for the Application of Microbatteries (Invited Paper)
Authors:
Hui Xia, Nus; Singapore Singapore
Lu Li, National University of Singapore; Singapore
Presented at PICALO 2008

Miniaturization of electronic devices such as laboratory-on-chip or system-on-ship requires small power supply unit such as in micrometer size. Therefore all-solid-state microbatteries become important in those applications. This paper reports the studies and developments of thin film electrodes in the thickness of a few micrometers which were fabricated by a pulsed laser deposition technique. It has been demonstrated that the thin film electrodes not only have high power capacity but...

PICALO 2008 Paper #M403 (Nd:Yag Laser and Micropen Integrated Fabrication of Mim Thick Film Capacitors)

Nd:Yag Laser and Micropen Integrated Fabrication of Mim Thick Film Capacitors
Authors:
Xiaoyan Zeng, Hust; Wuhan Peoples Republic of China
Yu Cao, HUST; Wuhan Peoples Republic of China
Xiangyou Li, Huazhong University of Science and Technology ; Wuhan Peoples Republic of China
Presented at PICALO 2008

With rapid development of the electronic industry, how to respond the market requests quickly, shorten R&D prototyping fabrication period, and reduce the cost of the electronic devices have become a challenge work, which need flexible manufacturing methods. In this work, two direct-write processing methods, direct material deposition by micropen and Nd:YAG laser micro cla...

PICALO 2008 Paper #M404 (Experimental Micromachining Results using a Uv Laser with the Laser Microjet®)

Experimental Micromachining Results using a Uv Laser with the Laser Microjet�
Authors:
Alexandre Pauchard, Synova Sa; Ecublens Switzerland
Nandor Vago, Synova Sa; Ecublens Switzerland
Nicolas Godde, Synova SA; Ecublens Switzerland
Bernold Richerzhagen, Synova Sa; Ecublens Switzerland
Presented at PICALO 2008

UV wavelengths are interesting for photothermal cutting of materials that have a low absorption coefficient or are transparent at 1064 and 532 nm wavelengths, such as copper, sapphire or glass. The high photon energy of UV lasers plays also a significant role in photochemical machining of polymer materials such as polyimide. In addition to the absorp...

PICALO 2008 Paper #M502 (Microwelding Performance Comparison Between a Low Power (125W) Pulsed Nd:Yag Laser and a Low Power (200W) Single Mode Fiber Laser)

Microwelding Performance Comparison Between a Low Power (125W) Pulsed Nd:Yag Laser and a Low Power (200W) Single Mode Fiber Laser
Authors:
Mohammed Naeem, GSI Group, Inc. - Laser Division; Rugby Great Britain
Steffan Lewis, Gsi Group; Rugby Great Britain
John Crinn, Gsi Group; Rugby Great Britain
Presented at PICALO 2008

The increasing complexity of microelectronics/ engineering devices and the requirement for higher yields and automated production systems place stringent demands on the assembly techniques and performance requirements of materials and joining techniques. This has led to increasing interest in the use of low power lasers for microwelding of small assem...